TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS#: 175923-04-3

By great_watson-int,
TETRAKISETHYLMETHYLAMINOZIRCONIUM-CAS-175923-04-3
IdentificationPhysical DataSpectra
Route of Synthesis (ROS)Safety and HazardsOther Data

Identification

英文名TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
IUPAC Nameethyl(methyl)azanide;zirconium(4+)
分子结构TETRAKISETHYLMETHYLAMINOZIRCONIUM-CAS-175923-04-3
CAS编号 175923-04-3
MDL NumberMFCD03427131
别名Tetrakis(ethylmethylamino)zirconium
175923-04-3
Tetrakis(ethylmethylamino)zirconium(IV)
ethyl(methyl)azanide;zirconium(4+)
MFCD03427131
Tetrakis(ethylmethylamido)zirconium(IV)
SCHEMBL328877
AKOS015910994
?TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
CS-0111417
Tetrakis(ethylmethylamino)zirconium 99.999%
Tetrakis(ethylmethylamido)zirconium(IV), >=99.99% trace metals basis
Tetrakis(ethylmethylamido)zirconium(IV), packaged for use in deposition systems
分子式C12H32N4Zr
分子量323.63
InChIInChI=1S/4C3H8N.Zr/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4
InChI KeySRLSISLWUNZOOB-UHFFFAOYSA-N
Isomeric SMILESCC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C.[Zr+4]

Physical Data

AppearanceColorless to yellow liquid

Spectra

No data available

Route of Synthesis (ROS)

No data available

Safety and Hazards

Pictogram(s)
SignalDanger
GHS Hazard StatementsH225 (98.55%): Highly Flammable liquid and vapor [Danger Flammable liquids]
H226 (33.33%): Flammable liquid and vapor [Warning Flammable liquids]
H261 (63.77%): In contact with water releases flammable gas [Danger Substances and mixtures which in contact with water, emit flammable gases]
H314 (34.78%): Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]
H315 (63.77%): Causes skin irritation [Warning Skin corrosion/irritation]
H319 (63.77%): Causes serious eye irritation [Warning Serious eye damage/eye irritation]
H335 (100%): May cause respiratory irritation [Warning Specific target organ toxicity, single exposure; Respiratory tract irritation]
Precautionary Statement CodesP210, P231+P232, P233, P240, P241, P242, P243, P260, P261, P264, P264+P265, P271, P280, P301+P330+P331, P302+P352, P302+P361+P354, P303+P361+P353, P304+P340, P305+P351+P338, P305+P354+P338, P316, P319, P321, P332+P317, P337+P317, P362+P364, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501
(The corresponding statement to each P-code can be found at the GHS Classification page.)

Other Data

Use Pattern
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS#: 175923-04-3 may be used as a metal-organic precursor for thin film deposition in semiconductor manufacturing. It serves as a source of zirconium for the preparation of thin film coatings, such as in the fabrication of integrated circuits and other electronic devices.