TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS#: 175923-04-3; 凯望编码 (ChemWhat Code): 33748
Identification
| 英文名 | TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM |
| IUPAC Name | ethyl(methyl)azanide;zirconium(4+) |
| 分子结构 |  |
| CAS编号 | 175923-04-3 |
| MDL Number | MFCD03427131 |
| 别名 | Tetrakis(ethylmethylamino)zirconium 175923-04-3 Tetrakis(ethylmethylamino)zirconium(IV) ethyl(methyl)azanide;zirconium(4+) MFCD03427131 Tetrakis(ethylmethylamido)zirconium(IV) SCHEMBL328877 AKOS015910994 ?TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CS-0111417 Tetrakis(ethylmethylamino)zirconium 99.999% Tetrakis(ethylmethylamido)zirconium(IV), >=99.99% trace metals basis Tetrakis(ethylmethylamido)zirconium(IV), packaged for use in deposition systems |
| 分子式 | C12H32N4Zr |
| 分子量 | 323.63 |
| InChI | InChI=1S/4C3H8N.Zr/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4 |
| InChI Key | SRLSISLWUNZOOB-UHFFFAOYSA-N |
| Isomeric SMILES | CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C.[Zr+4] |
Physical Data
| Appearance | Colorless to yellow liquid |
Spectra
No data available
Route of Synthesis (ROS)
No data available
Safety and Hazards
| Pictogram(s) |  |
| Signal | Danger |
| GHS Hazard Statements | H225 (98.55%): Highly Flammable liquid and vapor [Danger Flammable liquids] H226 (33.33%): Flammable liquid and vapor [Warning Flammable liquids] H261 (63.77%): In contact with water releases flammable gas [Danger Substances and mixtures which in contact with water, emit flammable gases] H314 (34.78%): Causes severe skin burns and eye damage [Danger Skin corrosion/irritation] H315 (63.77%): Causes skin irritation [Warning Skin corrosion/irritation] H319 (63.77%): Causes serious eye irritation [Warning Serious eye damage/eye irritation] H335 (100%): May cause respiratory irritation [Warning Specific target organ toxicity, single exposure; Respiratory tract irritation] |
| Precautionary Statement Codes | P210, P231+P232, P233, P240, P241, P242, P243, P260, P261, P264, P264+P265, P271, P280, P301+P330+P331, P302+P352, P302+P361+P354, P303+P361+P353, P304+P340, P305+P351+P338, P305+P354+P338, P316, P319, P321, P332+P317, P337+P317, P362+P364, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501 (The corresponding statement to each P-code can be found at the GHS Classification page.) |
Other Data
| Use Pattern |
| TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS#: 175923-04-3 may be used as a metal-organic precursor for thin film deposition in semiconductor manufacturing. It serves as a source of zirconium for the preparation of thin film coatings, such as in the fabrication of integrated circuits and other electronic devices. |
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